1. Introduction
In recentyears,materialsabsorbingelectromagneticwave
(EMW) haveattractedworldwideattentionasaresultofthe
developmentofradar-absorbingtechnology [1]. Siliconcar-
bide (SiC)ceramicisagoodselectiontofabricateEMW
absorptionmaterialsbecauseofitswidebandgapandpractical
applicationsinsevereenvironments.However,ithasbeen
demonstratedthatthelowelectricalconductivityofpureSiC
results inlowdielectricloss [2], suchasSiCpowders [3], SiC
foams [4], andSiCmatrixcomposites [5]. Inourprevious
work [6], porousSi3N4–SiC compositeceramicswith11vol%
SiC wasfabricated,whichachievedaminimumreflectionloss
of 6.7 dBat12.2GHz.Nonetheless,thedielectricproperties
of CVISiCalsoneedtobeimproved.
Changing theconductivityofSiCbydopingisaneffective
way toimproveitsdielectricproperties [7]. Itwasreportedthat
1. บทนำใน recentyears, materialsabsorbingelectromagneticwaveHaveattractedworldwideattentionasaresultofthe (EMW)developmentofradar-absorbingtechnology [1] Siliconcar-bide ceramicisagoodselectiontofabricateEMW (SiC)absorptionmaterialsbecauseofitswidebandgapandpracticalapplicationsinsevereenvironmentsอย่างไรก็ตาม ithasbeendemonstratedthatthelowelectricalconductivityofpureSiCผล inlowdielectricloss [2], suchasSiCpowders [3], SiCโฟม [4], andSiCmatrixcomposites [5] Inourpreviousงาน [6], SiC porousSi3N4-compositeceramicswith11vol %ซิลิก้อน wasfabricated, whichachievedaminimumreflectionlossของ 6.7 dBat 12.2 GHz Nonetheless, thedielectricpropertiesของ CVISiCalsoneedtobeimprovedเปลี่ยน theconductivityofSiCbydopingisaneffectiveวิธี toimproveitsdielectricproperties [7] Itwasreportedthat
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